Hitachi High-Tech Launches DCR Etch System 9060 Series, Supporting Isotropic Etching of Advanced 3D Devices at the Atomic Level
TOKYO, Nov 28, 2024 – (JCN Newswire via SeaPRwire.com) – Hitachi High-Tech Corporation (“Hitachi High-Tech”) announced today the launch of its DCR(1) Etch System 9060Series. This system, which leverages Hitachi High-Tech’s plasma etching(2) technology and expertise, has been developed to achieve precise control over the horizontal (isotropic) etching process in dry environments, aimed at applications […]